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Tel: +886-3-4260556
Fax: +886-3-4260561
The latest model: TSL-SP7-LS3 is announced
Date Published: 2024/6/18
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Inspect defects on the photo mask by optical lens capturing system. The inspection system can reduce damages and promote product quality.
Introduction
Inspection ability:
Min. line/space width: 3 µm↑
Min. defect size: 1 µm
Inspection Area (Max.) : 750*650mm
Inspection speed: <50 min (Inspection area:500 x 400mm)