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FSM INLINE & DIMENSIONAL METROLOGY
Model: FSM 900 SERIES
Category: Machines & Equipments for PCB / PCB Testing Equipment / Film Thickness Meter (Film Thickness Measuring Systems)
Characteristics
New materials are very sensitive to oxidation at elevated temperatures.They are also prone to outgas or exhibit physical and material changes, the FSM 900TC-Vac offers a sealed heating type chamber that simulates process conditions. It can operate either under a completely inert gas environment (with very low partial pressure of oxygen) or under high vacuum mode.
‧ Characterization of Low K, Copper and other thin film materials
‧ Temperature up to 900℃
‧ Operation in vacuum or inert gas
Specs
New materials are very sensitive to oxidation at elevated temperatures. They are also prone to outgas or exhibit physical and material changes, the FSM 900TC-Vac offers a sealed heating type chamber that simulates process conditions. It can operate either under a completely inert gas environment (with very low partial pressure of oxygen) or under high vacuum mode.
• Characterization of Low K, Copper and other thin film materials
• Temperature up to 900℃
• Operation in vacuum or inert gas
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