Featured Products
- Routing Machine (6)
- Laser Direct Imaging (5)
- Laser Driller (4)
- Circuit Board Processing (3)
- (2)
- Eyelets (1)
- Others (1)
Related Products
-
Ultra-compact CtS System with UV laser diodes
Model: MultiDX!
-
LPKF 3D-MID LDS
Model: LPKF Fusion 3D 1200
-
LPKF 3D-MID LDS
Model: LPKF Fusion 3D 1100
-
LPKF 3D-MID LDS
Model: LPKF Fusion 3D 1500
Contact Information
Tel:886-3-2223170
Fax: 886-3-2223150
- Home
- Featured Products
- Maskless lithography systems
Maskless lithography systems
Model: DaLI
Category: Machines & Equipments for PCB / PCB Dry Process Equipment / Laser Direct Imaging
Characteristics
Maskless lithography systems is a general desktop system, suitable for maskless lithography of all standard photoresists. The minimum line width can reach 1um and the 20 times high aspect ratio structure can be realized. Its comprehensive software solution covers all steps from design to exposure and makes DaLI an intuitive solution for maskless lithography. DaLI uses an AOD acousto-optic deflector and a stable laser source to expose the lithographic structure without the need for a photomask. The maskless lithography function makes design changes a breeze because it eliminates the highly sensitive step of aligning the sample with the mask and saves time and money in the process. DaLI is especially suitable for academic units, research units and company R&D units and laboratories.
Specs
General |
Substrate size,mm from sub-millimeter to 100 x 100 x 10 |
Supported photoresists All common photoresists |
Optical Characteristics |
Laser wavelength, nm 375 or 405 |
Beam spot size, μm 1 and 3 (software-selectable) |
Performance
|
Structure aspect ratio: more than 1:20 Writing speed(spots per second), Hz: 100,000 Structure aspect ratio: more than 1:20(up to 1:40) |
Writing resolution(beam positioning): True sub-nanometer Minimum structure size, um: <1 Multilayer alignment accuracy, um: 0.5 |
User Interface |
Data Input ofrmats : DXF, BMP Intuitive CAD software for design, alignment, advanced anchoring and exposure control
|
Integrated optical monochrome or color Microscope for inspection and alignment |
Technical data |
Operating temperature,°C: 21.5 ±1.5 System dimensions, mm: 650 x 626 x 522 (W x D x H) Electrical supply voltage: 110230 VACA, 50/60Hz Chiller data: 133 x 483 x 559 mm3 (19” rack, 3U), 15kg 250W cooling capacity |
Operating relative humidity, %: <80, non-condensing System weight, kg:77 Power consumption, VA: <120 Hardware/software requirements: Windows 10 / 8.1 / 8, 64 bit, 3GHz processor with SSE2 higher, 4GB of RAM and 16GB available hard disk space |
All inclusive |
The DaLI system is shipped with the chiller, all connecting cables, coolant hoses and the Proprietary DaLI software. |
Featured Products
-
Femtosecond Laser Hybrid Micro-fabrication System
-
SSAIL (Selective Surface Activation Induced by Laser)
-
Ultra-compact CtS System with UV laser diodes
-
8 inch Maskless Lithography System
-
Maskless Exposure
-
Riveting and Bonding
-
Maskless lithography systems
-
Stencil Laser Equipment
-
Automated Laser Depaneling of Rigid and Flexible PCBs
-
LPKF 3D-MID LDS
-
Micromaterial processing with Laser Technology
-
Stencil Laser Equipment
-
UV Laser system for Flex Drilling and Cutting
-
LPKF Through-Glass Vias with Laser Precisions
-
LPKF ML UV Laser Cutting