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Femtosecond Laser Hybrid Micro-fabrication System

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Femtosecond Laser Hybrid Micro-fabrication System

Model: Femtika Laser Nanofactory

Category: Machines & Equipments for PCB / PCB Dry Process Equipment / Laser Driller

Characteristics

Femtosecond laser hybrid micro-fabrication workstation

Specs

Laser Nanofactory Technical Specifications
Technology		Multiphoton Polymerization				Selective Laser Etching	Hybrid
Laser Source
Femtosecond Laser	Wavelength	780nm	1030±10nm 515±10nm			1030±10nm	1030±10nm and 515±10nm
	Repetition rate	100MHz	11 MHz ... 76 MHz		Single-shot – 1 MHz	Single-shot – 1 MHz	Single-shot – 1 MHz
	Pulse duration	<100 fs	50 fs 120 fs 170 fs		290 fs – 20 ps (tunable)	250 fs (450 fs) – 10 ps (tunable)	190 fs – 10 ps (tunable)
	Max. average power	250mW	2 W		5 W	10 W	from 5 W to 20 W*
	Long-term Power stability	< 0.5% RMS over 24 h	< 0.5% RMS over 100 h
Positioning
Linear stages with synchronized Galvano scanners		XYZ positioning stages mounted on grantite base with bridge
		Travel(XYZ)		160 x 160 x 60mm
		Accuracy(XYZ)		±300nm
		Resolution(XYZ)		1nm
		Maximum speed(XY)		200mm/s
		Galvano Scanners
		Accuracy		50μrad
		Repeatability		0.4 μrad RMS

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