Laser Nanofactory Technical Specifications

Technology

Multiphoton Polymerization

Selective Laser Etching

Hybrid

Laser Source

Femtosecond

Laser

Wavelength

780nm

1030±10nm

515±10nm

1030±10nm

1030±10nm and

515±10nm

Repetition rate

100MHz

11 MHz ...

76 MHz

Single-shot –

1 MHz

Single-shot –

1 MHz

Single-shot –

1 MHz

Pulse duration

<100 fs

50 fs

120 fs

170 fs

290 fs –

20 ps

(tunable)

250 fs

(450 fs) –

10 ps (tunable)

190 fs – 10 ps

(tunable)

Max. average power

250mW

2 W

5 W

10 W

from 5 W

to 20 W*

Long-term

Power stability

< 0.5% RMS

over 24 h

< 0.5% RMS over 100 h

Positioning

Linear stages with synchronized Galvano scanners

XYZ positioning stages mounted on grantite base with bridge

Travel(XYZ)

160 x 160 x 60mm

Accuracy(XYZ)

±300nm

Resolution(XYZ)

1nm

Maximum speed(XY)

200mm/s

Galvano Scanners

Accuracy

50μrad

Repeatability

0.4 μrad RMS