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聯絡資訊
302新竹縣竹北市台元科技園區台元街28號6樓之6
電話:886-3-5525333
傳真:886-3-5525323
PVA TePla IoN 10V / 40 / 100 電漿清洗系統
產品型號:PVA TePla IoN 10V / 40 / 100
產品分類:硬板用設備 / 硬板用濕製程設備 / 電漿清潔及表面處理機
產品特色
IoN 10V等離子體係是我們最新推出的微波等離子體。 這種低成本,中等尺寸的晶圓批量拋光機具有先進的功能,並針對小型鑄造廠,大學和初創公司的需求。
IoN 10V配備了新的,最先進的組件和軟體,以精確控制處理參數。 該技術已經成功地用於功率晶體管,模擬設備,傳感器,光學器件,光子學,MEMS / MOEMS,生物器件等。
IoN 10V的佔地面積小,需要最少的實驗室空間,並提供簡單的安裝和維護。 調平腳輪和製動器低,易於安裝和靈活性。
PVA TePla IoN 40 氣體電漿清洗系統
全功能的電漿表面處理!
‧ 靈活的電極設計,改進製程的一致性
‧ 工業應用電腦配WindowsR系統
‧ GUI 圖形用戶介面與大觸控螢幕軟體, 寫入Semi E95-1101和第二部分的FDA CFR, #21
‧ 製程參數控制
‧ 自行診斷功能和圖形
‧ Ethernet 乙太網通信
‧ 節能控制功能
‧ 備用氣體選擇
‧ 安裝容易,即插即用
PVA TePla IoN 100 是專為滿足廣大客戶不斷變化的需求而設計,它強調多功能性和控制他們的表面處理需求。其功能提供最先進的程序控制狀態,故障安全系統報警和資料獲取軟體。這使系統在生命科學產業,以滿足嚴格的品質控制程式。
產品規格
PLASMA SYSTEM - IoN 40
The IoN 40 is our latest advancement in vacuum plasma technology. Gas plasma is fast becoming the technology of choice for surface modification of materials in the life sciences, electronic and industrial arenas due to its versatility and low impact to our environment. For example, the trend towards miniaturization in medical diagnostics requires precision cleaning, and selective chemical functionalization. Plasma removes organic contamination several orders of magnitude more efficiently than wet chemical processing and can chemically functionalize surfaces at the nano-scale. As a result, plasma is replacing older types of treatments that are no longer practical or economical.
The IoN 40 is designed to meet the evolving demands of our customers, emphasizing versatility and control for their surface treatment needs. Its advanced features provide state of the art process control, fail-safe system alarms and data capturing software. This enables the system to meet stringent quality control programs in the Life Science industries. The IoN 40 uses radio frequency (RF) generated plasma in a compact, fully integrated package. Its bench top design allows for easy installation in laboratory or production environments.
Features include:
-
Fully configurable chamber that can accommodate
various electrode configurations for medium sized
complex 3-dimensional parts or high volume small
part processing - Industrial computer with a Windows® based system
- Graphical User Interface (GUI) software complies with CFR Title 24 Part 11 and Semi E95-1101
- User access control for separate process
- development, operator and maintenance programming and control
- Configurable process tolerance controls allowing precise lot-to-lot repeatability
- Remote statistical process control monitoring via Ethernet
- Onboard diagnostic features and alarm logging
- Recipe editor offers fast and versatile step control functionality
- Liquid Crystal Display (LCD) touch panel and keyboard
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