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• 2024 TSL-PEL-DRC Pellicle inspection machine

 

2024 TSL-PEL-DRC Pellicle inspection machine

 

Date Published: 2024/6/19

 

Product brief Inspect particle/scratch in each layer
inspection object Mask
platform 12" photomask box
inspection area 300mm X 300mm
inspection speed < 15min (Single layer)
inspection mode DRC
scan area "pellicle top--A
pellicle backside--B
Pattern top--D
Photomask backside--C"
defect type Stains/flock/scratches/dust/damage/fingerprints
min. particle size 0.5um

 

Link: http://www.testersoft.com